E-beam Electron Beam
E3 Early Equipment Evaluation
EAPSM Enbedded-attenuated Phase Shift Mask
EAROM Electrically Alterable Read-only Memory
EASE Equipment And Software Emulator
EBHT Electron Beam High Throughput Lithography
EBIC Electron Beam-induced Current
EBIT Electron Beam Ion Trap
EBR Edge Bead Removal
EBR Etchback Rate
EBSD Electron Backscattering Diffraction
EC Engineering Change
EC Equipment Controller
ECA Engineering Capability Assessment
ECA Elemental Criticality Analysis
ECAD Electronic Computer-aided Design
ECAD Engineering Computer-aided Design
ECAE Electronic Computer-aided Engineering
ECAG Equipment Class Application Guideline
ECC Error Control Coding
ECD Electron Capture Detector
ECD Electrical Critical Dimension
ECD Electrochemical Deposition
ECL Emitter Coupled Logic
ECMD Electrochemical-mechanical Deposition
ECN Engineering Change Notice
ECO Engineering Change Order
ECO Edge Control Only
ECP Electrochemical Plating
ECQB Electrochemical Quartz Crystal Balance
ECR Electron Cyclotron Resonance
ECTFE Ethylene Chlorotrifluoroethylene
EDA Electronic Design Automation
EDA Equipment Data Acquisition
EDD Earliest Due Date
EDI Electronic Data Interchange
EDIF Electronic Design Interchange Format
EDP Electronic Data Processing
EDS Energy-dispersive Spectroscopy
EDS Electron-dispersive Spectroscopy
EDU Equipment Dependent Uptime
EDX Energy-dispersive X-ray
EDXA Energy-dispersive X-ray Analysis
EEC Equipment Engineering Capability
EEDF Electron Energy Distribution Function
EELS Electron Energy-loss Spectroscopy
EEPROM Electrically Erasable Programmable Read Only Memory
EFEM Equipment Front-end Module
EFO Electronic Flame-off
EFOCS Evanescent Fiber Optic Chemical Sensors
EFTIR Emission Fourier Transform Infrared Spectroscopy
EFV Excess Flow Valve
EG Extrinsic Gettering
EGE Ethylene Glycol Ethers
eHARP Enhanced High Aspect Ratio Process
EHO Estimated Hourly Output
EHS Extremely Hazardous Substances
EI Equipment Integration
EIA Electronic Industries Association
EIC Extracted Ion Count
EID Equipment Interface Development
EID Energy Isolation Device
EIP Equipment Improvement Program
EIP Equipment Improvement Project
EIS Electrochemical Impedance Spectroscopy
EIS Environmental Impact Study
EKF Extended Kalman Filter
EL Experience Level
EL Exposure Latitude
ELAT Exposure Latitute
ELF Extremely Low Frequency
ELL Entrance Loadlock
ELNES Energy Loss Near Edge Structure
ELS Extended Life Source
ELU Environmental Loan Unit
EM Enterprise Model
EM Electromagnetic
EM Electromigration
EMA Effective Medium Approximation
EMA Equipment Maturity Assessment
EMC Electromagnetic Capability
EMC Electromagnetic Compatibility
EMF Electromagnetic Field
EMG Electromigration
EMI Electromagnetic Interference
EMMA Electron Microscopy And Microanalysis
EMO Emergency Off
EMP Electromagnetic Pulse
EMR Enter Move Request
EMU Electromagnetic Unit
EOL End-of-line
EOS Electrical Overstress
EOT End Of Transfer
EOT Equivalent Oxide Thickness
EOY End Of Year
EP Extreme Pressure
EP Electropolish
EP Electroplating
EP Ellipsometric Porosimetry
EPA Environmental Protection Agency
EPL Electron Projection Lithography
EPM Equipment Performance Metrics
EPO Emergency Power Off
EPR Electron Paramagnetic Resonance
EPRI Electrical Power Research Institute, Inc.
EPROM Electrically Programmable Read-only Memory
EPSM Embedded Phase Shift Mask
EPSS Electronic Performance Support System
EPT Equipment Performance Tracking
EPT Endpoint
EQUIP C/I Equipment Control And Integration
EQUIP RTC Equipment Real-time Control
Er Erbium
ERAM Equipment Reliability, Availability, And Maintainability
ERC Equivalent Release Concentration
ERC Electrical Rule Check
ERD Elastic Recoil Detection
ERG Enhancement And Review Group
ERM Enterprise Reference Model
ERN External Recurrent Neural Network
ERP Extended Range Pyrometer
ERS Event Reporting Standard
ERT Emergency Response Time
Es Einsteinium
ES Engineering Specification
ES Expert System
ESA Electrostatic Attraction
ESC Electrostatic Chuck
ESCA Electron Spectroscopy (for) Chemical Analysis
ESD Electrostatic Discharge
ESED Environmental Scattered Electron Detector
ESEM Environmental Scanning Electron Microscope
ESH Environment, Safety, And Health
ESL Etchstop Layer
ESM Electronic Service Manual
ESR Electron Spin Resonance
ETAB Executive Technical Advisory Board
ETQR External Total Quality And Reliability
ETS Engineering Test Stand
Eu Europium
EUV Extreme Ultraviolet
EUVL Extreme Ultraviolet Lithography
EUVLLC EUV Limited Liability Corporation
eV Electronvolt
EVC Equilibrium Vapor Concentration
EW Electrolyzed Water
EWF Effective Workfunction
EWMA Exponentially Weighted Moving Average
EYE Edinburgh Yield Estimator