S Sulfur
S/A Sensor/actuator
S/D Source/drain
s/n Serial Number
S/N Signal-to-noise
SA Surface Area
SA Subresolution Assist
SA Structured Analysis
SA Sensitivity Analysis
SAA Static Automated Analysis
SAB Sensor/actuator Bus
SACVD Sub-atmospheric Chemical Vapor Deposition
SAD Selected Area Diffraction
SAE Society Of Automotive Engineers
SAF Stuck-at Fault
SAM Scanning Auger Microscopy
SAM Scanning Acoustical Microscopy
SAM Self-assembled Monolayer
SANS Small Angle Neutron Scattering
SAT Spray Acid Tool
SAW Surface Acoustic Wave
SAXS X-ray Scattering
Sb Antimony
SB Strong Base Ion Exchange
SBC Standard Buried Collector
SBl Safety Bulletin
Sc Scandium
SC1 Standard Clean 1
SC2 Standard Clean 2
SCA Surface Charge Analysis
SCALE SEMATECH Cell Application Learning Environment
SCALPEL Scattering With Aperture Limited Projection Lithography
SCBA Self-contained Breathing Apparatus
SCC Strategic Cell Controller
SCCDRM Single Crystal Critical Dimension Reference Material
SCCS Source Code Control System
SCDS Super Catalytic Decomposition System
SCE Saturated Calomel Electrode
SCE Short Channel Effects
SCE Short Channel Effects
SCF Supercritical Fluid
SCFH Standard Cubic Feet Per Hour
SCI Surface Charge Imaging
SCIC Semiconductor Integrated Circuit
SCM Scanning Capacitance Microscopy
SCOE SEMATECH Center Of Excellence
SCP Single Chip Package
SCR Silicon Controlled Rectifier
SD Small Dual In-line Package
SD Structured Design
SDFL Schottky-diode FET Logic
SDLC Synchronous Data Link Control
SDM Specific Device Model
SDS Smart Distributed System
SDS Safe Delivery System
SDSI Synchronous Data-link Control
Se Selenium
SE Spectroscopic Ellipsometry
SE Secondary Electron
SE Scattered Electron
SEAJ Semiconductor Equipment Association Of Japan
SEC Size Exclusion Chromatography
SECS Semiconductor Equipment Communications Standard
SEG Selective Epitaxial Growth
SEIM Software Engineering Improvement Method
SEM Scanning Electron Microscopy
SEM Specific Equipment Model
SEMI Semiconductor Equipment And Materials International
SemiSPIN Semiconductor Software Process Improvement Network
SEP Software Engineering Process
SEP Spin Etch Planarization
SEPG Software Engineering Process Group
SEQDB Semiconductor Equipment Database
SER Soft Error Rate
SETEC Semiconductor Equipment Technology Center
SEVD Sphere Equivalent Volume Diameter
SFC Supercritical Fluid Chromatography
SFCS Shop Floor Control System
SFCS I/F Shop Floor Control System Interface
SFP Stress-free Polishing
SGML Standard Generalized Markup Language
SGMM Semiconductor Generic Manufacturing Model
SGMRS Semiconductor Generic Manufacturing Requirements Specification
SHI Spatial Heterodyned Interferometry
Si Silicon
SIA Semiconductor Industry Association
SIDP Sputter Ion Depth Profiling
SIL Systems Integration Lab (was ATF)
SILC Stress-induced Leakage Current
SiLK Silicon Low-k
SIM Selective Ion Marketing
SIM Selective Ion Monitoring
SIMO Single Input, Multi Output
SIMOX Separation By Implantation Of Oxygen
SIMS Secondary Ion Mass Spectroscopy
SIP SEMATECH Internal Program
SIP Self-ionizing Plasma
SIRIJ Semiconductor Industry Research Institute Of Japan
SIS Self-ionized Sputter
SISO Single Input, Single Output
SIV Sensors In Vacuum
SL Specification Limit
SLAM Scanning Laser Acoustic Microscopy
SLAM Single Layer Alumina Metallization
SLC Surface Laminar Circuit
SLDY Systematic Limited Yield
SLM Single-level Metal
SLOC Source Lines Of Code
SLSI Super Large Scale Integration
Sm Samarium
SM Stress Migration
SMB Single-mask Bumping
SMC Surface-mounted Components
SMD Surface-mounted Device
SME Subject Matter Expert
SME Software Maintenance Engineer
SME Semiconductor Manufacturing Equipment
SMG Screen Management Guide
SMIF Standard Mechanical Interface
SMLY Systematic Mechanisms Limited Yield
SMPM SECS Message Protocol Machine
SMR Semiconductor Mask Representation
SMS SECS Message Service
SMT Surface Mount Technology
SMTS Strategic Material Transport System
Sn Tin
SNL Sandia National Laboratory
SNMS Sputtered Neutral Mass Spectroscopy
SNOM Scanning Nearfield Optical Microscopy
SNR Signal-to-noise Ratio
SO Small Outline (package)
SOC System On A Chip
SOC Silicon-on-chip
SoCoMo Source Collector Module
SOD Spin-on Dielectric
SODAS SEMATECH Organized Damage Analysis Software
SOG Spin-on Glass
SOI Silicon On Insulator
SOIC Small Outline Integrated Circuit
SOM Scanning Optical Microscopy
SOM Sulfuric Acid-ozone Mixture
SON Small Outline Nonleaded Package
SONOS Silicon/oxide/nitride/oxide/silicon
SOP Standard Operating Procedure
SOS Silicon On Sapphire
SOW Statement Of Work
SPC Statistical Process Control
SPF Spectral Purity Filter
SPI Software Process Improvement
SPICE Simulation Program With Integrated Circuit Emphasis
SPIDER SEMATECH Process Induced Damage Effect Revealer
SPIDER-MEM SPIDER-Manufacturing Equipment Monitor
SPIN Software Process Improvement Network
SPL Surface Protection Layer
SPM Scanning Probe Microscopy
SPM Sulfuric Acid/hydrogen Peroxide Mixture
SPP Single-phase Printing
SPR Semiconductor Process Representation
SPS Surface Preparation System
SPT Shortest Processing Time
SPV Surface Photovoltage
SQC Statistical Quality Control
SQL Structured Query Language
SQPMM Software Quality And Process Maturity Model
Sr Strontium
SRAC Supplier Relations Action Council
SRAM Static Random Access Memory
SRC Semiconductor Research Corporation
SRM Standard Reference Material
SRP Spreading Resistance Probe
SRPT Shortest Remaining Processing Time
SRS Software Requirements Specification
SSA Semiconductor Safety Association
SSA Spatial Signature Analysis
SSC Subsystem Controller
SSE Sum Squared Error
SSEM Stepper Specific Equipment Model
SSI Small Scale Integration
SSM Strategic Sourcing Methodology
SSQA Standardized Supplier Quality Assessment
SSRL SEMATECH Software Reuse Library
SSRP SEMATECH Software Reuse Program
STA Static Timing Analysis
STAR Simultaneous Transmitted And Reflected
STEL Short-term Exposure Limit
STEM Scanning Transmission Electron Microscope/microscopy
STI Shallow Trench Isolation
STIFI Shallow Trench Isolation Final Inspection
STM Scanning Tunneling Microscopy
STP Standard Temperature And Pressure
STP System Test Plan
SU Subresolution Attenuated
SUT System Under Test
SVD Singular Value Decomposition
SVID System Variable Identifier
SWAT Software Action Team
SWC Solvent Waste Collection
SWEAT Standard Wafer-level Electromigration Accelerated Test
SWI Static Walkthrough/inspection
SWIM Semiconductor Workbench For Integrated Modeling
SWP Single Wafer Processing
SWR Semiconductor Wafer Representation
SWV Square Wave Voltammetry
SXR Specular X-ray Reflectance Or Reflectometry

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