X Inductive Reactance
XANES X-ray Adsorption Near Edge Structure Spectroscopy
XAS X-ray Absorption Spctrosopcy
Xe Xenon
XLL Exit Loadlock
XLS Excimer Laser System
XLS Extended Light Scatterer
XPS X-ray Photoelectron Spectroscopy
XRD X-ray Diffraction
XRF X-ray Fluorescence Spectrometry
XRR X-ray Reflectometry
XSEM Cross-sectional Scanning Electron Microscopy

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