A-GEMTF Advanced GEM Task Force
A/D Analog To Digital
AA Atomic Absorption
AAS Atomic Absorption Spectroscopy
ABC Activity-based Costing
ABC Auto-adjustment Of Image Brightness And Contrast
ABM Activity-based Management
ABS Antilock Braking System
ABT Abrasive Technology
ABW Apparent Beam Width
Ac Actinium
AC Alternating Current
AC Activated Carbon
ACCESS Analysis Computer For Component Engineering Services Support
ACF Anisotropic Conductive Film
ACGHIC American Conference Of Governmental Industrial Hygienists
ACI After Clean Inspection
ACLV Across-chip Linewidth Variation
ACP Anisotropic Conductive Paste
ACR Absolute Cryogenic Radiometer
ACT Alternative Control Techniques
ACT actual Cycle Time
ADC Analog-to-digital Converter
ADC Automated Data Collection
ADC Automatic Defect Classification
ADE Advanced Development Environment
ADIG Application Development Interface Guidelines
ADIO Analog/digital Input/output
ADL Add Lot
ADP Administrative Data Processing
ADT Applied Diagnostic Techniques
ADTSEM Apply/Develop Track Specific Equipment Model
AE Atomic Emission
AE Acoustic Emission
AE Absolute Ellipsometry
AE Advanced Energy
AEC Advanced Equipment Controller
AECS Advanced Equipment Control System
AECS Automated Equipment Control System
AEI After Etch Inspection
AEI Automated Equipment Interface
AEM Analytical Electron Microscopy
AES Auger Emission Spectroscopy
AES Auger Electron Spectroscopy
AEX Acid Exhaust
AFD Application Framework Definition
AFM Atomic Force Microscopy
AFP Abrasive-free Polish
Ag Silver
AGV Automated Guided Vehicle
AHF Anhydrous Hydrogen Fluoride
AHU Air Handling Unit
AI Artificial Intelligence
AIChE American Institute Of Chemical Engineers
AID After Develop Inspection
AIMS Aerial Image Microscope
AIMS Aerial Image Measurement System
AIMS Aerial Image Monitoring System
AIR Automated Image Retrieval
AIT Aerial Image Tool
Al Aluminum
ALCVD Atomic Layer Chemical Vapor Deposition
ALD Atomic Layer Deposition
ALE Atomic Layer Epitaxy
ALE Application Logic Element
AlF Aluminum Fluoride
ALID Alarm Event Identifier
ALS Advanced Light Source (LBNL)
ALS Advanced Low-power Schottky
Alt Alternating
altPSM Alternating Phase Shift Mask
ALU Arithmetic Logic Unit
Am Americium
AMC Airborne Molecular Contamination
AMH Automated Material Handling
AMHS Automated Material Handling System
AML Automatic Model Linking
AMRC Advanced Materials Research Center
AMT Advanced Manufacturing Technology
AMU Atomic Mass Unit
ANN Artificial Neural Network
ANOVA Analysis Of Variance
ANS Advanced Nanodefect Surface Inspection System
ANSI American National Standards Institute
AOM Acousto-optic Modulators
AOQL Average Outgoing Quality Level
AOV Air-operated Valve
AP Adhesion Promoter
APA Advanced Performance Algorithm
APC Advanced Process Control
APCD Add-on Pollution Control Devices
APCFI Advanced Process Control Framework Initiative
APCVD Atmospheric Pressure Chemical Vapor Deposition
APD Adhesion Promoter Dispense
APEC Advanced Process Equipment Control
API Application Programming Interface
API Atmospheric Pressure Ionization
APIMS Atmospheric Pressure Ionization Mass Spectroscopy
APM Atmospheric Passivation Module
APM Acoustic Plate Mode
APM Ammonium Hydroxide/hydrogen Peroxide Mixture
APRDL Advanced Products Research And Development Laboratory
APSM Attenuating Phase Shift Mask
APT Advanced Probe Technology
AQ Administrative Quality
AQI ACCESS Query Interface
AQL Acceptance Quality Level: Acceptable Quality Level
AQTX Aquatic Toxicity
Ar Argon
AR Aspect Ratio
AR Antireflective
ARAMS Automated Reliability, Availability, And Maintainability Standard
ARC Antireflective Coating
ARDE Aspect Ratio-dependent Etching
ArF Exposure Wavelength
ARIMA Auto Regressive Moving Average With Integration
ARO After Reciept Of Order
ARPA Advanced Research Projects Agency (see DARPA)
ARS Angle-resolved Scattering
As Arsenic
AS/RS Automated Storage And Retrieval System
ASAP Advanced Stepper Application Program
ASAP As Soon As Possible
ASHRAE American Society Of Heating Refrigeration And Airconditioning Engineers
ASIC Application-specific Integrated Circuit
ASME American Society For Mechanical Engineering
ASO Automatic Shutoff
ASP Advanced Strip And Passivation
ASP Advanced Strip Processor
ASR Automated Send Receive
ASTM American Society For Testing And Materials
ASV Advanced Safety Vehicle
At Astatine
ATDF Advanced Tool Development Facility
ATE Automatic Test Equipment
ATF Automation Test Facility (recently Renamed SIL)
ATG Automatic Test Generation
ATLAS Abbreviated Test Language For All Systems
atm Atmosphere
ATP Advanced Technology Program
ATP Adenosine Triphosphate
ATP Acceptance And Tool Performance
ATR Attenuated Total Reflectance
ATR-FTIR Attenuated Total Reflectance Fourier Transform Infrared Spectroscopy
Att Attenuated
AttPSM Attenuated Phase Shift Mask
Au Gold
AVP Advanced Vertical Processor
AVS Advanced Visualization System
AWE Asymptotic Waveform Evaluation
AWISPM Above-wafer In Situ Particle Monitoring
AWS Advanced Wet Station