S |
Sulfur |
S/A |
Sensor/actuator |
S/D |
Source/drain |
s/n |
Serial Number |
S/N |
Signal-to-noise |
SA |
Surface Area |
SA |
Subresolution Assist |
SA |
Structured Analysis |
SA |
Sensitivity Analysis |
SAA |
Static Automated Analysis |
SAB |
Sensor/actuator Bus |
SACVD |
Sub-atmospheric Chemical Vapor Deposition |
SAD |
Selected Area Diffraction |
SAE |
Society Of Automotive Engineers |
SAF |
Stuck-at Fault |
SAM |
Scanning Auger Microscopy |
SAM |
Scanning Acoustical Microscopy |
SAM |
Self-assembled Monolayer |
SANS |
Small Angle Neutron Scattering |
SAT |
Spray Acid Tool |
SAW |
Surface Acoustic Wave |
SAXS |
X-ray Scattering |
Sb |
Antimony |
SB |
Strong Base Ion Exchange |
SBC |
Standard Buried Collector |
SBl |
Safety Bulletin |
Sc |
Scandium |
SC1 |
Standard Clean 1 |
SC2 |
Standard Clean 2 |
SCA |
Surface Charge Analysis |
SCALE |
SEMATECH Cell Application Learning Environment |
SCALPEL |
Scattering With Aperture Limited Projection Lithography |
SCBA |
Self-contained Breathing Apparatus |
SCC |
Strategic Cell Controller |
SCCDRM |
Single Crystal Critical Dimension Reference Material |
SCCS |
Source Code Control System |
SCDS |
Super Catalytic Decomposition System |
SCE |
Saturated Calomel Electrode |
SCE |
Short Channel Effects |
SCE |
Short Channel Effects |
SCF |
Supercritical Fluid |
SCFH |
Standard Cubic Feet Per Hour |
SCI |
Surface Charge Imaging |
SCIC |
Semiconductor Integrated Circuit |
SCM |
Scanning Capacitance Microscopy |
SCOE |
SEMATECH Center Of Excellence |
SCP |
Single Chip Package |
SCR |
Silicon Controlled Rectifier |
SD |
Small Dual In-line Package |
SD |
Structured Design |
SDFL |
Schottky-diode FET Logic |
SDLC |
Synchronous Data Link Control |
SDM |
Specific Device Model |
SDS |
Smart Distributed System |
SDS |
Safe Delivery System |
SDSI |
Synchronous Data-link Control |
Se |
Selenium |
SE |
Spectroscopic Ellipsometry |
SE |
Secondary Electron |
SE |
Scattered Electron |
SEAJ |
Semiconductor Equipment Association Of Japan |
SEC |
Size Exclusion Chromatography |
SECS |
Semiconductor Equipment Communications Standard |
SEG |
Selective Epitaxial Growth |
SEIM |
Software Engineering Improvement Method |
SEM |
Scanning Electron Microscopy |
SEM |
Specific Equipment Model |
SEMI |
Semiconductor Equipment And Materials International |
SemiSPIN |
Semiconductor Software Process Improvement Network |
SEP |
Software Engineering Process |
SEP |
Spin Etch Planarization |
SEPG |
Software Engineering Process Group |
SEQDB |
Semiconductor Equipment Database |
SER |
Soft Error Rate |
SETEC |
Semiconductor Equipment Technology Center |
SEVD |
Sphere Equivalent Volume Diameter |
SFC |
Supercritical Fluid Chromatography |
SFCS |
Shop Floor Control System |
SFCS I/F |
Shop Floor Control System Interface |
SFP |
Stress-free Polishing |
SGML |
Standard Generalized Markup Language |
SGMM |
Semiconductor Generic Manufacturing Model |
SGMRS |
Semiconductor Generic Manufacturing Requirements Specification |
SHI |
Spatial Heterodyned Interferometry |
Si |
Silicon |
SIA |
Semiconductor Industry Association |
SIDP |
Sputter Ion Depth Profiling |
SIL |
Systems Integration Lab (was ATF) |
SILC |
Stress-induced Leakage Current |
SiLK |
Silicon Low-k |
SIM |
Selective Ion Marketing |
SIM |
Selective Ion Monitoring |
SIMO |
Single Input, Multi Output |
SIMOX |
Separation By Implantation Of Oxygen |
SIMS |
Secondary Ion Mass Spectroscopy |
SIP |
SEMATECH Internal Program |
SIP |
Self-ionizing Plasma |
SIRIJ |
Semiconductor Industry Research Institute Of Japan |
SIS |
Self-ionized Sputter |
SISO |
Single Input, Single Output |
SIV |
Sensors In Vacuum |
SL |
Specification Limit |
SLAM |
Scanning Laser Acoustic Microscopy |
SLAM |
Single Layer Alumina Metallization |
SLC |
Surface Laminar Circuit |
SLDY |
Systematic Limited Yield |
SLM |
Single-level Metal |
SLOC |
Source Lines Of Code |
SLSI |
Super Large Scale Integration |
Sm |
Samarium |
SM |
Stress Migration |
SMB |
Single-mask Bumping |
SMC |
Surface-mounted Components |
SMD |
Surface-mounted Device |
SME |
Subject Matter Expert |
SME |
Software Maintenance Engineer |
SME |
Semiconductor Manufacturing Equipment |
SMG |
Screen Management Guide |
SMIF |
Standard Mechanical Interface |
SMLY |
Systematic Mechanisms Limited Yield |
SMPM |
SECS Message Protocol Machine |
SMR |
Semiconductor Mask Representation |
SMS |
SECS Message Service |
SMT |
Surface Mount Technology |
SMTS |
Strategic Material Transport System |
Sn |
Tin |
SNL |
Sandia National Laboratory |
SNMS |
Sputtered Neutral Mass Spectroscopy |
SNOM |
Scanning Nearfield Optical Microscopy |
SNR |
Signal-to-noise Ratio |
SO |
Small Outline (package) |
SOC |
System On A Chip |
SOC |
Silicon-on-chip |
SoCoMo |
Source Collector Module |
SOD |
Spin-on Dielectric |
SODAS |
SEMATECH Organized Damage Analysis Software |
SOG |
Spin-on Glass |
SOI |
Silicon On Insulator |
SOIC |
Small Outline Integrated Circuit |
SOM |
Scanning Optical Microscopy |
SOM |
Sulfuric Acid-ozone Mixture |
SON |
Small Outline Nonleaded Package |
SONOS |
Silicon/oxide/nitride/oxide/silicon |
SOP |
Standard Operating Procedure |
SOS |
Silicon On Sapphire |
SOW |
Statement Of Work |
SPC |
Statistical Process Control |
SPF |
Spectral Purity Filter |
SPI |
Software Process Improvement |
SPICE |
Simulation Program With Integrated Circuit Emphasis |
SPIDER |
SEMATECH Process Induced Damage Effect Revealer |
SPIDER-MEM |
SPIDER-Manufacturing Equipment Monitor |
SPIN |
Software Process Improvement Network |
SPL |
Surface Protection Layer |
SPM |
Scanning Probe Microscopy |
SPM |
Sulfuric Acid/hydrogen Peroxide Mixture |
SPP |
Single-phase Printing |
SPR |
Semiconductor Process Representation |
SPS |
Surface Preparation System |
SPT |
Shortest Processing Time |
SPV |
Surface Photovoltage |
SQC |
Statistical Quality Control |
SQL |
Structured Query Language |
SQPMM |
Software Quality And Process Maturity Model |
Sr |
Strontium |
SRAC |
Supplier Relations Action Council |
SRAM |
Static Random Access Memory |
SRC |
Semiconductor Research Corporation |
SRM |
Standard Reference Material |
SRP |
Spreading Resistance Probe |
SRPT |
Shortest Remaining Processing Time |
SRS |
Software Requirements Specification |
SSA |
Semiconductor Safety Association |
SSA |
Spatial Signature Analysis |
SSC |
Subsystem Controller |
SSE |
Sum Squared Error |
SSEM |
Stepper Specific Equipment Model |
SSI |
Small Scale Integration |
SSM |
Strategic Sourcing Methodology |
SSQA |
Standardized Supplier Quality Assessment |
SSRL |
SEMATECH Software Reuse Library |
SSRP |
SEMATECH Software Reuse Program |
STA |
Static Timing Analysis |
STAR |
Simultaneous Transmitted And Reflected |
STEL |
Short-term Exposure Limit |
STEM |
Scanning Transmission Electron Microscope/microscopy |
STI |
Shallow Trench Isolation |
STIFI |
Shallow Trench Isolation Final Inspection |
STM |
Scanning Tunneling Microscopy |
STP |
Standard Temperature And Pressure |
STP |
System Test Plan |
SU |
Subresolution Attenuated |
SUT |
System Under Test |
SVD |
Singular Value Decomposition |
SVID |
System Variable Identifier |
SWAT |
Software Action Team |
SWC |
Solvent Waste Collection |
SWEAT |
Standard Wafer-level Electromigration Accelerated Test |
SWI |
Static Walkthrough/inspection |
SWIM |
Semiconductor Workbench For Integrated Modeling |
SWP |
Single Wafer Processing |
SWR |
Semiconductor Wafer Representation |
SWV |
Square Wave Voltammetry |
SXR |
Specular X-ray Reflectance Or Reflectometry |