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Oxidation
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Overview
Application
Properties of oxide layers
Fabrication of oxide layers
Thermal oxidation
Oxidation by vapor deposition
LOCOS technology
Very large-scale integration
Bird's beak
Alternative
Film thickness measurement
Metrology
Interferometry
Ellipsometry
Appraisal of the measurement
Index
Fundamentals
Wafer Fabrication
Oxidation
Overview
Fabrication of oxide layers
LOCOS technology
Film thickness measurement
Deposition
Metallization
Photolithography
Wet Chemistry
Dry Etching
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Chipfertigung
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