• Fundamentals
• Wafer Fabrication
• Oxidation
  • Overview
  • Fabrication of oxide layers
  • LOCOS technology
  • Film thickness measurement
• Deposition
• Metallization
• Photolithography
• Wet Chemistry
• Dry Etching

Oxidation: Index

• Overview
  • Application
  • Properties of oxide layers
• Fabrication of oxide layers
  • Thermal oxidation
  • Oxidation by vapor deposition
• LOCOS technology
  • Very large-scale integration
  • Bird's beak
  • Alternative
• Film thickness measurement
  • Metrology
  • Interferometry
  • Ellipsometry
  • Evaluation of the measurement