• Fundamentals
• Wafer Fabrication
• Oxidation
• Deposition
• Metallization
• Photolithography
• Wet Chemistry
  • Etch processes
  • Wet etching
  • Wafer cleaning
• Dry Etching

Wet Chemistry: Index

• Etch processes
• Wet etching
  • Principle
  • Requirements
  • Batch etching
  • Spray etching
  • Anisotropic etching of silicon
  • Etching solutions for isotropic etching
• Wafer cleaning
  • Cleanroom
  • Types of contamination
  • Microscopic contamination
  • Molecular contamination
  • Alkaline and metallic contamination
  • Cleaning techniques