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Verweise

Bücher

• Silizium-Halbleitertechnologie, U. Hilleringmann, Teubner Studienskripten, 1996
• Fundamentals of Semiconductor Manufacturing and Process Control, Gary S. May, Costas J. Spanos, Wiley-IEEE Press, 2006
• Handbook of Photomask Manufacturing Technology, Syed Rizvi, CRC, 2005
• Halbleiter, Infineon Technologies, Publicis Corporate Publishing, 2003
• Introduction to Semiconductor Manufacturing Technology, Hong Xiao, Prentice Hall, 2000
• Semiconductor Manufacturing Technology, Michael Quirk, Julian Serda, Prentice Hall, 2000
• Semiconductor Device Fundamentals, Robert F. Pierret, Addison Wesley, 1996

Paper

• Reliability analysis of Cu contacts with various diffusion barriers, Wang, K.; Wilson, C.J.; Cuthbertson, A.; Herberholz, R.; Coulson, H.P.; O'Neill, A.G.; Horsfall, A.B.; Atmel North Tyneside Ltd., Newcastle upon Tyne
• Current Technical Trends: Dual Damascene & Low-k Dielectrics, Healey on behalf of Threshold Systems
• Economic Analysis of NIST's Low-k Materials Characterization Research, Brent R. Rowe, Michael P. Gallaher; Dorota S. Temple; Alex V. Rogozhin; RTI International

Internet

• International Technology Roadmap for Semiconductors, http://www.itrs.net/
• Semiconductor International, http://www.semiconductor.net/
• ASML, http://www.asml.com/
• Advanced Micro Devices, http://www.amd.com/
• Semiconductor Insights, http://www.semiconductor.com/
• Wikipedia - Die freie Enzyklopädie, http://de.wikipedia.org/
• The Singularity is Near, http://www.singularity.com/
• Intel Corporation, http://www.intel.com/
• TecChannel.de, http://www.tecchannel.de/