Bücher
- Silizium-Halbleitertechnologie, U. Hilleringmann, Teubner Studienskripten, 1996
- Fundamentals of Semiconductor Manufacturing and Process Control, Gary S. May, Costas J. Spanos, Wiley-IEEE Press, 2006
- Handbook of Photomask Manufacturing Technology, Syed Rizvi, CRC, 2005
- Halbleiter, Infineon Technologies, Publicis Corporate Publishing, 2003
- Introduction to Semiconductor Manufacturing Technology, Hong Xiao, Prentice Hall, 2000
- Semiconductor Manufacturing Technology, Michael Quirk, Julian Serda, Prentice Hall, 2000
- Semiconductor Device Fundamentals, Robert F. Pierret, Addison Wesley, 1996