Fundamentals of Semiconductor Manufacturing and Process Control, Gary S. May, Costas J. Spanos, Wiley-IEEE Press , 2006
Handbook of Photomask Manufacturing Technology, Syed Rizvi, CRC, 2005
Halbleiter, Infineon Technologies, Publicis Corporate Publishing, 2003
Introduction to Semiconductor Manufacturing Technology, Hong Xiao, Prentice Hall, 2000
Semiconductor Manufacturing Technology, Michael Quirk, Julian Serda, Prentice Hall, 2000
Silizium-Halbleitertechnologie, U. Hilleringmann, Teubner Studienskripten, 1996
Semiconductor Device Fundamentals, Robert F. Pierret, Addison Wesley, 1996
Paper
Reliability analysis of Cu contacts with various diffusion barriers, Wang, K.; Wilson, C.J.; Cuthbertson, A.; Herberholz, R.; Coulson, H.P.; O'Neill, A.G.; Horsfall, A.B.; Atmel North Tyneside Ltd., Newcastle upon Tyne
Current Technical Trends: Dual Damascene & Low-k Dielectrics, Healey on behalf of Threshold Systems
Economic Analysis of NIST's Low-k Materials Characterization Research, Brent R. Rowe, Michael P. Gallaher; Dorota S. Temple; Alex V. Rogozhin; RTI International
CD-Signature evaluation using Scatterometry
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