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Evolution of the physical gate length in micro processors (MPU)

The values represent the real/printed gate length of MOS field effect transistors on the wafer; these correlate approximately to the effective channel length. In the past the smallest structure (half pitch) was used as indication of size.

Source:

  • http://www.itrs.net/Links/2011ITRS/Home2011.htm

Note: this data make no claim to be complete but should give a brief overview of semiconductor industries development.