Deposition

Plasma, the fourth aggregation state of a material

• Plasma state
• Plasma generation

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Chemical vapor deposition

• Silicon vapor phase epitaxy
• CVD process: Chemical Vapor Deposition
• APCVD: Atmospheric Pressure CVD
• LPCVD: Low Pressure CVD
• PECVD: Plasma Enhanced CVD
• ALD: Atomic Layer deposition
• Gap fill

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Physical deposition methods

• MBE: Molecular beam epitaxy
• Evaporating
• Sputtering

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