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Deposition
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Plasma, the fourth aggregation state of a material
Plasma state
Plasma generation
Chemical vapor deposition
Silicon vapor phase epitaxy
CVD process: Chemical Vapor Deposition
APCVD: Atmospheric Pressure CVD
LPCVD: Low Pressure CVD
PECVD: Plasma Enhanced CVD
ALD: Atomic Layer deposition
Physical deposition methods
Molecular beam epitaxy
Evaporating
Sputtering
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Plasma, the fourth aggregation state of a material
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Content
Fundamentals
Wafer Fabrication
Oxidation
Deposition
Plasma, the fourth aggregation state of a material
Chemical vapor deposition
Physical deposition methods
Metallization
Photolithography
Wet Chemistry
Dry Etching