Semiconductor Technology
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Oxidation
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Overview
Application
Properties of oxide layers
Fabrication of oxide layers
Thermal oxidation
Oxidation by vapor deposition
LOCOS technology
Very large-scale integration
Bird's beak
Alternative
Film thickness measurement
Metrology
Interferometry
Ellipsometry
Appraisal of the measurement
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Content
Fundamentals
Wafer Fabrication
Oxidation
Overview
Fabrication of oxide layers
LOCOS technology
Film thickness measurement
Deposition
Metallization
Photolithography
Wet Chemistry
Dry Etching