Semiconductor Technology
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Evolution of the gate length of MOSFETs
Exposure wavelength vs. critical dimensions
FLOPS: floating point operations
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Manufacturing costs for different technology nodes
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Millions of instructions per second
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Photolithography
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Exposure and resist coating
Overview
Adhesives
Coating
Exposure
Exposure methods
Exposition methods
Overview
Contact exposure
Proximity exposure
Projection
Electron beam lithography
X-ray lithography
Additional methods
Photoresist
Photoresist
Chemical composition
Development and inspection
Development
Inspection
Resist removal
Photomasks
Introduction
Photomask manufacture
Photomasks
Next generation lithography
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Content
Fundamentals
Wafer Fabrication
Oxidation
Deposition
Metallization
Photolithography
Exposure and resist coating
Exposition methods
Photoresist
Development and inspection
Photomasks
Wet Chemistry
Dry Etching