Verweise
- Silizium-Halbleitertechnologie, U. Hilleringmann, Teubner Studienskripten, 1996
- Fundamentals of Semiconductor Manufacturing and Process Control, Gary S. May, Costas J. Spanos, Wiley-IEEE Press, 2006
- Handbook of Photomask Manufacturing Technology, Syed Rizvi, CRC, 2005
- Halbleiter, Infineon Technologies, Publicis Corporate Publishing, 2003
- Introduction to Semiconductor Manufacturing Technology, Hong Xiao, Prentice Hall, 2000
- Semiconductor Manufacturing Technology, Michael Quirk, Julian Serda, Prentice Hall, 2000
- Semiconductor Device Fundamentals, Robert F. Pierret, Addison Wesley, 1996
- Reliability analysis of Cu contacts with various diffusion barriers, Wang, K.; Wilson, C.J.; Cuthbertson, A.; Herberholz, R.; Coulson, H.P.; O'Neill, A.G.; Horsfall, A.B.; Atmel North Tyneside Ltd., Newcastle upon Tyne
- Current Technical Trends: Dual Damascene & Low-k Dielectrics, Healey on behalf of Threshold Systems
- Economic Analysis of NIST's Low-k Materials Characterization Research, Brent R. Rowe, Michael P. Gallaher; Dorota S. Temple; Alex V. Rogozhin; RTI International
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International Technology Roadmap for Semiconductors,
http://www.itrs.net/
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Semiconductor International,
http://www.semiconductor.net/
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ASML,
http://www.asml.com/
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Advanced Micro Devices,
http://www.amd.com/
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Semiconductor Insights,
http://www.semiconductor.com/
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Wikipedia - Die freie Enzyklopädie,
http://de.wikipedia.org/
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The Singularity is Near,
http://www.singularity.com/
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Intel Corporation,
http://www.intel.com/
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TecChannel.de,
http://www.tecchannel.de/
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ElectroIQ,
http://www.electroiq.com