Halbleitertechnologie von A bis Z

Alles über Halbleiter und die Waferfertigung


  • Silizium-Halbleitertechnologie, U. Hilleringmann, Teubner Studienskripten, 1996
  • Fundamentals of Semiconductor Manufacturing and Process Control, Gary S. May, Costas J. Spanos, Wiley-IEEE Press, 2006
  • Handbook of Photomask Manufacturing Technology, Syed Rizvi, CRC, 2005
  • Halbleiter, Infineon Technologies, Publicis Corporate Publishing, 2003
  • Introduction to Semiconductor Manufacturing Technology, Hong Xiao, Prentice Hall, 2000
  • Semiconductor Manufacturing Technology, Michael Quirk, Julian Serda, Prentice Hall, 2000
  • Semiconductor Device Fundamentals, Robert F. Pierret, Addison Wesley, 1996


  • Reliability analysis of Cu contacts with various diffusion barriers, Wang, K.; Wilson, C.J.; Cuthbertson, A.; Herberholz, R.; Coulson, H.P.; O'Neill, A.G.; Horsfall, A.B.; Atmel North Tyneside Ltd., Newcastle upon Tyne
  • Current Technical Trends: Dual Damascene & Low-k Dielectrics, Healey on behalf of Threshold Systems
  • Economic Analysis of NIST's Low-k Materials Characterization Research, Brent R. Rowe, Michael P. Gallaher; Dorota S. Temple; Alex V. Rogozhin; RTI International