A-GEMTF |
Advanced GEM Task Force |
A/D |
Analog To Digital |
AA |
Atomic Absorption |
AAS |
Atomic Absorption Spectroscopy |
ABC |
Activity-based Costing |
ABC |
Auto-adjustment Of Image Brightness And Contrast |
ABM |
Activity-based Management |
ABS |
Antilock Braking System |
ABT |
Abrasive Technology |
ABW |
Apparent Beam Width |
Ac |
Actinium |
AC |
Alternating Current |
AC |
Activated Carbon |
ACCESS |
Analysis Computer For Component Engineering Services Support |
ACF |
Anisotropic Conductive Film |
ACGHIC |
American Conference Of Governmental Industrial Hygienists |
ACI |
After Clean Inspection |
ACLV |
Across-chip Linewidth Variation |
ACP |
Anisotropic Conductive Paste |
ACR |
Absolute Cryogenic Radiometer |
ACT |
Alternative Control Techniques |
ACT |
actual Cycle Time |
ADC |
Analog-to-digital Converter |
ADC |
Automated Data Collection |
ADC |
Automatic Defect Classification |
ADE |
Advanced Development Environment |
ADIG |
Application Development Interface Guidelines |
ADIO |
Analog/digital Input/output |
ADL |
Add Lot |
ADP |
Administrative Data Processing |
ADT |
Applied Diagnostic Techniques |
ADTSEM |
Apply/Develop Track Specific Equipment Model |
AE |
Atomic Emission |
AE |
Acoustic Emission |
AE |
Absolute Ellipsometry |
AE |
Advanced Energy |
AEC |
Advanced Equipment Controller |
AECS |
Advanced Equipment Control System |
AECS |
Automated Equipment Control System |
AEI |
After Etch Inspection |
AEI |
Automated Equipment Interface |
AEM |
Analytical Electron Microscopy |
AES |
Auger Emission Spectroscopy |
AES |
Auger Electron Spectroscopy |
AEX |
Acid Exhaust |
AFD |
Application Framework Definition |
AFM |
Atomic Force Microscopy |
AFP |
Abrasive-free Polish |
Ag |
Silver |
AGV |
Automated Guided Vehicle |
AHF |
Anhydrous Hydrogen Fluoride |
AHU |
Air Handling Unit |
AI |
Artificial Intelligence |
AIChE |
American Institute Of Chemical Engineers |
AID |
After Develop Inspection |
AIMS |
Aerial Image Microscope |
AIMS |
Aerial Image Measurement System |
AIMS |
Aerial Image Monitoring System |
AIR |
Automated Image Retrieval |
AIT |
Aerial Image Tool |
Al |
Aluminum |
ALCVD |
Atomic Layer Chemical Vapor Deposition |
ALD |
Atomic Layer Deposition |
ALE |
Atomic Layer Epitaxy |
ALE |
Application Logic Element |
AlF |
Aluminum Fluoride |
ALID |
Alarm Event Identifier |
ALS |
Advanced Light Source (LBNL) |
ALS |
Advanced Low-power Schottky |
Alt |
Alternating |
altPSM |
Alternating Phase Shift Mask |
ALU |
Arithmetic Logic Unit |
Am |
Americium |
AMC |
Airborne Molecular Contamination |
AMH |
Automated Material Handling |
AMHS |
Automated Material Handling System |
AML |
Automatic Model Linking |
AMRC |
Advanced Materials Research Center |
AMT |
Advanced Manufacturing Technology |
AMU |
Atomic Mass Unit |
ANN |
Artificial Neural Network |
ANOVA |
Analysis Of Variance |
ANS |
Advanced Nanodefect Surface Inspection System |
ANSI |
American National Standards Institute |
AOM |
Acousto-optic Modulators |
AOQL |
Average Outgoing Quality Level |
AOV |
Air-operated Valve |
AP |
Adhesion Promoter |
APA |
Advanced Performance Algorithm |
APC |
Advanced Process Control |
APCD |
Add-on Pollution Control Devices |
APCFI |
Advanced Process Control Framework Initiative |
APCVD |
Atmospheric Pressure Chemical Vapor Deposition |
APD |
Adhesion Promoter Dispense |
APEC |
Advanced Process Equipment Control |
API |
Application Programming Interface |
API |
Atmospheric Pressure Ionization |
APIMS |
Atmospheric Pressure Ionization Mass Spectroscopy |
APM |
Atmospheric Passivation Module |
APM |
Acoustic Plate Mode |
APM |
Ammonium Hydroxide/hydrogen Peroxide Mixture |
APRDL |
Advanced Products Research And Development Laboratory |
APSM |
Attenuating Phase Shift Mask |
APT |
Advanced Probe Technology |
AQ |
Administrative Quality |
AQI |
ACCESS Query Interface |
AQL |
Acceptance Quality Level: Acceptable Quality Level |
AQTX |
Aquatic Toxicity |
Ar |
Argon |
AR |
Aspect Ratio |
AR |
Antireflective |
ARAMS |
Automated Reliability, Availability, And Maintainability Standard |
ARC |
Antireflective Coating |
ARDE |
Aspect Ratio-dependent Etching |
ArF |
Exposure Wavelength |
ARIMA |
Auto Regressive Moving Average With Integration |
ARO |
After Reciept Of Order |
ARPA |
Advanced Research Projects Agency (see DARPA) |
ARS |
Angle-resolved Scattering |
As |
Arsenic |
AS/RS |
Automated Storage And Retrieval System |
ASAP |
Advanced Stepper Application Program |
ASAP |
As Soon As Possible |
ASHRAE |
American Society Of Heating Refrigeration And Airconditioning Engineers |
ASIC |
Application-specific Integrated Circuit |
ASME |
American Society For Mechanical Engineering |
ASO |
Automatic Shutoff |
ASP |
Advanced Strip And Passivation |
ASP |
Advanced Strip Processor |
ASR |
Automated Send Receive |
ASTM |
American Society For Testing And Materials |
ASV |
Advanced Safety Vehicle |
At |
Astatine |
ATDF |
Advanced Tool Development Facility |
ATE |
Automatic Test Equipment |
ATF |
Automation Test Facility (recently Renamed SIL) |
ATG |
Automatic Test Generation |
ATLAS |
Abbreviated Test Language For All Systems |
atm |
Atmosphere |
ATP |
Advanced Technology Program |
ATP |
Adenosine Triphosphate |
ATP |
Acceptance And Tool Performance |
ATR |
Attenuated Total Reflectance |
ATR-FTIR |
Attenuated Total Reflectance Fourier Transform Infrared Spectroscopy |
Att |
Attenuated |
AttPSM |
Attenuated Phase Shift Mask |
Au |
Gold |
AVP |
Advanced Vertical Processor |
AVS |
Advanced Visualization System |
AWE |
Asymptotic Waveform Evaluation |
AWISPM |
Above-wafer In Situ Particle Monitoring |
AWS |
Advanced Wet Station |