E-beam |
Electron Beam |
E3 |
Early Equipment Evaluation |
EAPSM |
Enbedded-attenuated Phase Shift Mask |
EAROM |
Electrically Alterable Read-only Memory |
EASE |
Equipment And Software Emulator |
EBHT |
Electron Beam High Throughput Lithography |
EBIC |
Electron Beam-induced Current |
EBIT |
Electron Beam Ion Trap |
EBR |
Edge Bead Removal |
EBR |
Etchback Rate |
EBSD |
Electron Backscattering Diffraction |
EC |
Engineering Change |
EC |
Equipment Controller |
ECA |
Engineering Capability Assessment |
ECA |
Elemental Criticality Analysis |
ECAD |
Electronic Computer-aided Design |
ECAD |
Engineering Computer-aided Design |
ECAE |
Electronic Computer-aided Engineering |
ECAG |
Equipment Class Application Guideline |
ECC |
Error Control Coding |
ECD |
Electron Capture Detector |
ECD |
Electrical Critical Dimension |
ECD |
Electrochemical Deposition |
ECL |
Emitter Coupled Logic |
ECMD |
Electrochemical-mechanical Deposition |
ECN |
Engineering Change Notice |
ECO |
Engineering Change Order |
ECO |
Edge Control Only |
ECP |
Electrochemical Plating |
ECQB |
Electrochemical Quartz Crystal Balance |
ECR |
Electron Cyclotron Resonance |
ECTFE |
Ethylene Chlorotrifluoroethylene |
EDA |
Electronic Design Automation |
EDA |
Equipment Data Acquisition |
EDD |
Earliest Due Date |
EDI |
Electronic Data Interchange |
EDIF |
Electronic Design Interchange Format |
EDP |
Electronic Data Processing |
EDS |
Energy-dispersive Spectroscopy |
EDS |
Electron-dispersive Spectroscopy |
EDU |
Equipment Dependent Uptime |
EDX |
Energy-dispersive X-ray |
EDXA |
Energy-dispersive X-ray Analysis |
EEC |
Equipment Engineering Capability |
EEDF |
Electron Energy Distribution Function |
EELS |
Electron Energy-loss Spectroscopy |
EEPROM |
Electrically Erasable Programmable Read Only Memory |
EFEM |
Equipment Front-end Module |
EFO |
Electronic Flame-off |
EFOCS |
Evanescent Fiber Optic Chemical Sensors |
EFTIR |
Emission Fourier Transform Infrared Spectroscopy |
EFV |
Excess Flow Valve |
EG |
Extrinsic Gettering |
EGE |
Ethylene Glycol Ethers |
eHARP |
Enhanced High Aspect Ratio Process |
EHO |
Estimated Hourly Output |
EHS |
Extremely Hazardous Substances |
EI |
Equipment Integration |
EIA |
Electronic Industries Association |
EIC |
Extracted Ion Count |
EID |
Equipment Interface Development |
EID |
Energy Isolation Device |
EIP |
Equipment Improvement Program |
EIP |
Equipment Improvement Project |
EIS |
Electrochemical Impedance Spectroscopy |
EIS |
Environmental Impact Study |
EKF |
Extended Kalman Filter |
EL |
Experience Level |
EL |
Exposure Latitude |
ELAT |
Exposure Latitute |
ELF |
Extremely Low Frequency |
ELL |
Entrance Loadlock |
ELNES |
Energy Loss Near Edge Structure |
ELS |
Extended Life Source |
ELU |
Environmental Loan Unit |
EM |
Enterprise Model |
EM |
Electromagnetic |
EM |
Electromigration |
EMA |
Effective Medium Approximation |
EMA |
Equipment Maturity Assessment |
EMC |
Electromagnetic Capability |
EMC |
Electromagnetic Compatibility |
EMF |
Electromagnetic Field |
EMG |
Electromigration |
EMI |
Electromagnetic Interference |
EMMA |
Electron Microscopy And Microanalysis |
EMO |
Emergency Off |
EMP |
Electromagnetic Pulse |
EMR |
Enter Move Request |
EMU |
Electromagnetic Unit |
EOL |
End-of-line |
EOS |
Electrical Overstress |
EOT |
End Of Transfer |
EOT |
Equivalent Oxide Thickness |
EOY |
End Of Year |
EP |
Extreme Pressure |
EP |
Electropolish |
EP |
Electroplating |
EP |
Ellipsometric Porosimetry |
EPA |
Environmental Protection Agency |
EPL |
Electron Projection Lithography |
EPM |
Equipment Performance Metrics |
EPO |
Emergency Power Off |
EPR |
Electron Paramagnetic Resonance |
EPRI |
Electrical Power Research Institute, Inc. |
EPROM |
Electrically Programmable Read-only Memory |
EPSM |
Embedded Phase Shift Mask |
EPSS |
Electronic Performance Support System |
EPT |
Equipment Performance Tracking |
EPT |
Endpoint |
EQUIP C/I |
Equipment Control And Integration |
EQUIP RTC |
Equipment Real-time Control |
Er |
Erbium |
ERAM |
Equipment Reliability, Availability, And Maintainability |
ERC |
Equivalent Release Concentration |
ERC |
Electrical Rule Check |
ERD |
Elastic Recoil Detection |
ERG |
Enhancement And Review Group |
ERM |
Enterprise Reference Model |
ERN |
External Recurrent Neural Network |
ERP |
Extended Range Pyrometer |
ERS |
Event Reporting Standard |
ERT |
Emergency Response Time |
Es |
Einsteinium |
ES |
Engineering Specification |
ES |
Expert System |
ESA |
Electrostatic Attraction |
ESC |
Electrostatic Chuck |
ESCA |
Electron Spectroscopy (for) Chemical Analysis |
ESD |
Electrostatic Discharge |
ESED |
Environmental Scattered Electron Detector |
ESEM |
Environmental Scanning Electron Microscope |
ESH |
Environment, Safety, And Health |
ESL |
Etchstop Layer |
ESM |
Electronic Service Manual |
ESR |
Electron Spin Resonance |
ETAB |
Executive Technical Advisory Board |
ETQR |
External Total Quality And Reliability |
ETS |
Engineering Test Stand |
Eu |
Europium |
EUV |
Extreme Ultraviolet |
EUVL |
Extreme Ultraviolet Lithography |
EUVLLC |
EUV Limited Liability Corporation |
eV |
Electronvolt |
EVC |
Equilibrium Vapor Concentration |
EW |
Electrolyzed Water |
EWF |
Effective Workfunction |
EWMA |
Exponentially Weighted Moving Average |
EYE |
Edinburgh Yield Estimator |