R2R |
Run-to-run |
Ra |
Radium |
RAC |
Remote Access And Control |
RAE |
Residue After Evaporation |
RAHU |
Recirculation Air Handling Unit |
RAIRS |
Reflection-absorption Infrared Spectroscopy |
RAM |
Random Access Memory |
RAM |
Reliability, Availability, And Maintainability |
RAMP |
Reliability Analysis And Modeling Program |
Rb |
Rubidium |
RBA |
Rotary Bonded Abrasive |
RBB |
Base Sheet Resistance |
RBC |
Radiation Boundary Condition |
RBMT |
Region-based Multi-thresholding |
RBS |
Refractive Backscattering |
RBS |
Rutherford Backscattering Spectroscopy |
RBV |
Ramp Breakdown Voltage |
RC |
Resistance-capacitance |
RCE |
Rotating Compensator Ellipsometer |
RCS |
Revision Control System |
RCT |
Reference Cluster Tool |
RCWA |
Rigorous Coupled Wave Analysis |
RDLY |
Random Limited Yield |
RDMT |
Radio, Dispatch, Mobile Data, Transportation Management |
RDR |
Rotating Disk Reactor |
RDS |
Remote Dispense System |
RDS |
Resist Dispense System |
Re |
Rhenium |
REL |
Recommended Exposure Limit |
RESSFOX |
Recessed Sealed Sidewall Field Oxidation |
RET |
Resolution Enhancement Technique |
RF |
Radio Frequency |
RF |
Resonance Frequency |
RFI |
Request For Information |
RFI |
Radio Frequency Interference |
RFM |
Radio Frequency Monitoring |
RFO |
Restricted Flow Orifice |
RFP |
Request For Plan |
RFP |
Request For Proposal |
RFP |
Radio Frequency Probe |
RFQ |
Request For Quote |
RFT |
Resonant Frequency Tool |
RGA |
Residual Gas Analysis |
RGV |
Rail Guided Vehicle |
Rh |
Rhodium |
RH |
Relative Humidity |
RI |
Reliability Improvement |
RIE |
Reactive Ion Etch |
RIM |
Read-in Mode |
RISC |
Reduced Instruction Set Computer/computing |
RIST |
Rule Induction And Statistical Testing |
RLI |
Resist Lithography |
RMI |
Remote Method Invocation |
RMOS |
Refractory Metal-oxide Semiconductor |
RMS |
Root Mean Square |
RMS |
Recipe Management Standard |
RMS |
Reticle Management System |
RMS |
Reference Management System |
RMSEP |
Root Mean Square Error Of Prediction |
RMTF |
Recipe Management Task Force |
Rn |
Radon |
RNN |
Recurrent Neural Network |
RO |
Reverse Osmosis |
ROC |
Remote Object Communications |
ROE |
Return On Equity |
ROI |
Return On Investment |
ROM |
Read-only Memory |
ROMP |
Ring Opening Metathesis Polymerization |
ROX |
Run Of Experiments |
RPAO |
Remote Plasma Assisted Oxidation |
RPC |
Remote Procedure Call |
RPD |
Relative Percent Deviation |
RPECVD |
Rapid Plasma-enhanced Chemical Vapor Deposition |
RPN |
Remote Plasma Nitridation |
RPS |
Relative Phase Shift |
RQ |
Reportable Quantity |
RR |
Removal Rate |
RRMSEP |
Relative Root Mean Square Error Of Prediction |
Rs |
Sheet Resistance |
RSCE |
Reverse Short Channel Effect |
RSE |
Reactive Sputter Etch |
RSF |
Relative Sensitivity Factor |
RSM |
Response Surface Methodology |
RSM |
Response Surface Matrix |
RSM |
Reciprocal Space Map |
RSP |
Reticle Standard Pod |
RT |
Room Temperature |
RTA |
Rapid Thermal Anneal |
RTB |
Real-time Backplane |
RTC |
Resist Test Center |
RTCVD |
Rapid Thermal Chemical Vapor Deposition |
RTD |
Resistance Temperature Detector |
RTE |
Radiation Transport Equation |
RTL |
Resistor-transistor Logic |
RTL |
Register Transfer Level |
RTM |
Rapid Thermal Multiprocessing |
RTO |
Rapid Thermal Oxidation |
RTO |
Regenerative Thermal Oxidizer |
RTP |
Rapid Thermal Processing (or Processor) |
RTR |
Real-time Reporting |
RTS |
Request To Send |
RTSPC |
Real-time Statistical Process Control |
RTV |
Room Temperature Vulcanizing |
RTY |
Retry Limit |
Ru |
Ruthenium |
RVB |
Ramped Voltage Breakdown |
RZ |
Return To Zero |