Semiconductor Technology
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Everything about semiconductors and wafer fabrication
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Evolution of the gate length of MOSFETs
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Wet Chemistry
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Etch processes
Wet etching
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Requirements
Batch etching
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Anisotropic etching of silicon
Etching solutions for isotropic etching
Wafer cleaning
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Alkaline and metallic contamination
Cleaning techniques
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Content
Fundamentals
Wafer Fabrication
Oxidation
Deposition
Metallization
Photolithography
Wet Chemistry
Etch processes
Wet etching
Wafer cleaning
Dry Etching