R2R Run-to-run
Ra Radium
RAC Remote Access And Control
RAE Residue After Evaporation
RAHU Recirculation Air Handling Unit
RAIRS Reflection-absorption Infrared Spectroscopy
RAM Random Access Memory
RAM Reliability, Availability, And Maintainability
RAMP Reliability Analysis And Modeling Program
Rb Rubidium
RBA Rotary Bonded Abrasive
RBB Base Sheet Resistance
RBC Radiation Boundary Condition
RBMT Region-based Multi-thresholding
RBS Refractive Backscattering
RBS Rutherford Backscattering Spectroscopy
RBV Ramp Breakdown Voltage
RC Resistance-capacitance
RCE Rotating Compensator Ellipsometer
RCS Revision Control System
RCT Reference Cluster Tool
RCWA Rigorous Coupled Wave Analysis
RDLY Random Limited Yield
RDMT Radio, Dispatch, Mobile Data, Transportation Management
RDR Rotating Disk Reactor
RDS Remote Dispense System
RDS Resist Dispense System
Re Rhenium
REL Recommended Exposure Limit
RESSFOX Recessed Sealed Sidewall Field Oxidation
RET Resolution Enhancement Technique
RF Radio Frequency
RF Resonance Frequency
RFI Request For Information
RFI Radio Frequency Interference
RFM Radio Frequency Monitoring
RFO Restricted Flow Orifice
RFP Request For Plan
RFP Request For Proposal
RFP Radio Frequency Probe
RFQ Request For Quote
RFT Resonant Frequency Tool
RGA Residual Gas Analysis
RGV Rail Guided Vehicle
Rh Rhodium
RH Relative Humidity
RI Reliability Improvement
RIE Reactive Ion Etch
RIM Read-in Mode
RISC Reduced Instruction Set Computer/computing
RIST Rule Induction And Statistical Testing
RLI Resist Lithography
RMI Remote Method Invocation
RMOS Refractory Metal-oxide Semiconductor
RMS Root Mean Square
RMS Recipe Management Standard
RMS Reticle Management System
RMS Reference Management System
RMSEP Root Mean Square Error Of Prediction
RMTF Recipe Management Task Force
Rn Radon
RNN Recurrent Neural Network
RO Reverse Osmosis
ROC Remote Object Communications
ROE Return On Equity
ROI Return On Investment
ROM Read-only Memory
ROMP Ring Opening Metathesis Polymerization
ROX Run Of Experiments
RPAO Remote Plasma Assisted Oxidation
RPC Remote Procedure Call
RPD Relative Percent Deviation
RPECVD Rapid Plasma-enhanced Chemical Vapor Deposition
RPN Remote Plasma Nitridation
RPS Relative Phase Shift
RQ Reportable Quantity
RR Removal Rate
RRMSEP Relative Root Mean Square Error Of Prediction
Rs Sheet Resistance
RSCE Reverse Short Channel Effect
RSE Reactive Sputter Etch
RSF Relative Sensitivity Factor
RSM Response Surface Methodology
RSM Response Surface Matrix
RSM Reciprocal Space Map
RSP Reticle Standard Pod
RT Room Temperature
RTA Rapid Thermal Anneal
RTB Real-time Backplane
RTC Resist Test Center
RTCVD Rapid Thermal Chemical Vapor Deposition
RTD Resistance Temperature Detector
RTE Radiation Transport Equation
RTL Resistor-transistor Logic
RTL Register Transfer Level
RTM Rapid Thermal Multiprocessing
RTO Rapid Thermal Oxidation
RTO Regenerative Thermal Oxidizer
RTP Rapid Thermal Processing (or Processor)
RTR Real-time Reporting
RTS Request To Send
RTSPC Real-time Statistical Process Control
RTV Room Temperature Vulcanizing
RTY Retry Limit
Ru Ruthenium
RVB Ramped Voltage Breakdown
RZ Return To Zero