| A-GEMTF | Advanced GEM Task Force |
| A/D | Analog To Digital |
| AA | Atomic Absorption |
| AAS | Atomic Absorption Spectroscopy |
| ABC | Activity-based Costing |
| ABC | Auto-adjustment Of Image Brightness And Contrast |
| ABM | Activity-based Management |
| ABS | Antilock Braking System |
| ABT | Abrasive Technology |
| ABW | Apparent Beam Width |
| Ac | Actinium |
| AC | Alternating Current |
| AC | Activated Carbon |
| ACCESS | Analysis Computer For Component Engineering Services Support |
| ACF | Anisotropic Conductive Film |
| ACGHIC | American Conference Of Governmental Industrial Hygienists |
| ACI | After Clean Inspection |
| ACLV | Across-chip Linewidth Variation |
| ACP | Anisotropic Conductive Paste |
| ACR | Absolute Cryogenic Radiometer |
| ACT | Alternative Control Techniques |
| ACT | actual Cycle Time |
| ADC | Analog-to-digital Converter |
| ADC | Automated Data Collection |
| ADC | Automatic Defect Classification |
| ADE | Advanced Development Environment |
| ADIG | Application Development Interface Guidelines |
| ADIO | Analog/digital Input/output |
| ADL | Add Lot |
| ADP | Administrative Data Processing |
| ADT | Applied Diagnostic Techniques |
| ADTSEM | Apply/Develop Track Specific Equipment Model |
| AE | Atomic Emission |
| AE | Acoustic Emission |
| AE | Absolute Ellipsometry |
| AE | Advanced Energy |
| AEC | Advanced Equipment Controller |
| AECS | Advanced Equipment Control System |
| AECS | Automated Equipment Control System |
| AEI | After Etch Inspection |
| AEI | Automated Equipment Interface |
| AEM | Analytical Electron Microscopy |
| AES | Auger Emission Spectroscopy |
| AES | Auger Electron Spectroscopy |
| AEX | Acid Exhaust |
| AFD | Application Framework Definition |
| AFM | Atomic Force Microscopy |
| AFP | Abrasive-free Polish |
| Ag | Silver |
| AGV | Automated Guided Vehicle |
| AHF | Anhydrous Hydrogen Fluoride |
| AHU | Air Handling Unit |
| AI | Artificial Intelligence |
| AIChE | American Institute Of Chemical Engineers |
| AID | After Develop Inspection |
| AIMS | Aerial Image Microscope |
| AIMS | Aerial Image Measurement System |
| AIMS | Aerial Image Monitoring System |
| AIR | Automated Image Retrieval |
| AIT | Aerial Image Tool |
| Al | Aluminum |
| ALCVD | Atomic Layer Chemical Vapor Deposition |
| ALD | Atomic Layer Deposition |
| ALE | Atomic Layer Epitaxy |
| ALE | Application Logic Element |
| AlF | Aluminum Fluoride |
| ALID | Alarm Event Identifier |
| ALS | Advanced Light Source (LBNL) |
| ALS | Advanced Low-power Schottky |
| Alt | Alternating |
| altPSM | Alternating Phase Shift Mask |
| ALU | Arithmetic Logic Unit |
| Am | Americium |
| AMC | Airborne Molecular Contamination |
| AMH | Automated Material Handling |
| AMHS | Automated Material Handling System |
| AML | Automatic Model Linking |
| AMRC | Advanced Materials Research Center |
| AMT | Advanced Manufacturing Technology |
| AMU | Atomic Mass Unit |
| ANN | Artificial Neural Network |
| ANOVA | Analysis Of Variance |
| ANS | Advanced Nanodefect Surface Inspection System |
| ANSI | American National Standards Institute |
| AOM | Acousto-optic Modulators |
| AOQL | Average Outgoing Quality Level |
| AOV | Air-operated Valve |
| AP | Adhesion Promoter |
| APA | Advanced Performance Algorithm |
| APC | Advanced Process Control |
| APCD | Add-on Pollution Control Devices |
| APCFI | Advanced Process Control Framework Initiative |
| APCVD | Atmospheric Pressure Chemical Vapor Deposition |
| APD | Adhesion Promoter Dispense |
| APEC | Advanced Process Equipment Control |
| API | Application Programming Interface |
| API | Atmospheric Pressure Ionization |
| APIMS | Atmospheric Pressure Ionization Mass Spectroscopy |
| APM | Atmospheric Passivation Module |
| APM | Acoustic Plate Mode |
| APM | Ammonium Hydroxide/hydrogen Peroxide Mixture |
| APRDL | Advanced Products Research And Development Laboratory |
| APSM | Attenuating Phase Shift Mask |
| APT | Advanced Probe Technology |
| AQ | Administrative Quality |
| AQI | ACCESS Query Interface |
| AQL | Acceptance Quality Level: Acceptable Quality Level |
| AQTX | Aquatic Toxicity |
| Ar | Argon |
| AR | Aspect Ratio |
| AR | Antireflective |
| ARAMS | Automated Reliability, Availability, And Maintainability Standard |
| ARC | Antireflective Coating |
| ARDE | Aspect Ratio-dependent Etching |
| ArF | Exposure Wavelength |
| ARIMA | Auto Regressive Moving Average With Integration |
| ARO | After Reciept Of Order |
| ARPA | Advanced Research Projects Agency (see DARPA) |
| ARS | Angle-resolved Scattering |
| As | Arsenic |
| AS/RS | Automated Storage And Retrieval System |
| ASAP | Advanced Stepper Application Program |
| ASAP | As Soon As Possible |
| ASHRAE | American Society Of Heating Refrigeration And Airconditioning Engineers |
| ASIC | Application-specific Integrated Circuit |
| ASME | American Society For Mechanical Engineering |
| ASO | Automatic Shutoff |
| ASP | Advanced Strip And Passivation |
| ASP | Advanced Strip Processor |
| ASR | Automated Send Receive |
| ASTM | American Society For Testing And Materials |
| ASV | Advanced Safety Vehicle |
| At | Astatine |
| ATDF | Advanced Tool Development Facility |
| ATE | Automatic Test Equipment |
| ATF | Automation Test Facility (recently Renamed SIL) |
| ATG | Automatic Test Generation |
| ATLAS | Abbreviated Test Language For All Systems |
| atm | Atmosphere |
| ATP | Advanced Technology Program |
| ATP | Adenosine Triphosphate |
| ATP | Acceptance And Tool Performance |
| ATR | Attenuated Total Reflectance |
| ATR-FTIR | Attenuated Total Reflectance Fourier Transform Infrared Spectroscopy |
| Att | Attenuated |
| AttPSM | Attenuated Phase Shift Mask |
| Au | Gold |
| AVP | Advanced Vertical Processor |
| AVS | Advanced Visualization System |
| AWE | Asymptotic Waveform Evaluation |
| AWISPM | Above-wafer In Situ Particle Monitoring |
| AWS | Advanced Wet Station |