| C | Carbon |
| C-to-C | Cassette-to-cassette |
| Ca | Calcium |
| CA | CIM Architecture |
| CA | Clear Aperture |
| CAA | CIM Applications Architecture |
| CAB | Competitive Analysis Benchmarking |
| CAD | Computer-aided Design |
| CADT | Control Application Development Tool |
| CAE | Computer-aided Engineering |
| CAF | Controlled Ambient Facility |
| CAG | Competitive Analysis Group |
| CAI | Computer-assisted Instruction |
| CALS | Computer-Aided Logistics Support (Air Force Program) |
| CAM | Computer-aided Manufacturing |
| CAP | Consumables Acceleration Program |
| CAPS | Computer-assisted Problem Solving |
| CAR | Computer-aided Research |
| CARC | Critical Aspect Ratio Collapse |
| CARL | Chemically Amplified Resist Lithography |
| CARRI | Computerized Assessment Of Relative Risk Impacts |
| CAS | Chemical Abstract Service |
| CASE | Computer-aided Software Engineering |
| CASE | Computer-aided Systems Engineering |
| CAT | Computer-aided Testing |
| CAT | Cassette Alignment Tool |
| CAW | Construction Analysis Workgroup |
| CAWC | Cryogenic Aerosol Wafer Cleaning |
| Cb | Columbiun |
| CBD | Correct-by-design |
| CBGA | Ceramic Ball Grid Array |
| CBIR | Content-based Image Retrieval |
| CBS | Chemical Bottle Storage Area |
| CBT | Computer-based Training |
| CC | Chip Carrier |
| CC | Cluster Controller |
| CCC | Ceramic Chip Carrier |
| CCD | Charge-coupled Device |
| CCOS | Computer-controlled Optical Surfacing |
| CCSL | Compatible Current-sinking Logic |
| CCW | Counterclockwise |
| Cd | Cadmium |
| CD | Critical Dimension |
| CD-ROM | Compact Disk Read-only Memory |
| CD/OL | Critical Dimension Overlay |
| CDA | Clean Dry Air |
| CDC | Chemical Data Council |
| CDE | Chemical Downstream Etch |
| CDEM | Customer Delivery Enterprise Model |
| CDF | Cumulative Distribution Function |
| CDG | Ceramic Diaphragm Gauge |
| CDI | Collector-diffusion Isolation |
| CDM | Common Device Model |
| CDM | Charge Device Model |
| CDO | Controlled Decomposition/oxidation |
| CDR | Chemical Distribution Room |
| CDU | Chemical Dispense Unit |
| Ce | Cerium |
| CE | Capillary Electrophoresis |
| CE | Conversion Efficiency |
| CEC | Cell Evaluation Chip |
| CEE | Control Execution Environment |
| CEID | Collection Event Identifier |
| CEM | Continuous Emissions Monitoring |
| CEN | Change Engineering Notice |
| CEPT | COMETS Equipment Performance Tracking |
| CER-DIP | Ceramic Dual In-line Package |
| CET | Capacitance Equivalent Thickness |
| Cf | Californium |
| CFA | Component Failure Analysis |
| CFC | Chlorofluorocarbon |
| CFD | Computational Fluid Dynamics |
| CFE | Cold Field Emission |
| CFI | CAD Framework Initiative |
| CFM | Contamination-free Manufacturing |
| CFMRC | Contamination-Free Manufacturing Research Center |
| CFT | Cross-functional Team |
| CGA | Compressed Gas Association |
| CHP | Coat Hotplate |
| CHR | Communication History Report |
| CI | Carrier Illumination |
| CI | Confidence Interval |
| CIC | Cleanroom Interface Chamber |
| CID | Charge-injection Device |
| CIE | Computer-integrated Engineering |
| CIM | Computer-integrated Manufacturing |
| CIM-OSA | Computer-integrated Manufacturing-open Systems Architecture |
| CIP | Continuous Improvement Program |
| CIS | Center For Integrated Systems |
| CISC | Complex Instruction Set Computer |
| Cl | Chlorine |
| CL | Cathodo-luminescent |
| CLC | Cancel Lot Cycle |
| CLCC | Ceramic Leaded Chip Carrier |
| CLIC | Closed-loop Intensity Control |
| CLY | Circuit-limited Yield |
| Cm | Curium |
| CM | Configuration Management |
| CM | Cassette Module |
| CMA | Cylindrical Mirror Analyzer |
| CMC | Cassette Module Controller |
| CML | Current Mode Logic |
| CMM | Capability Maturity Model |
| CMM | Coordinate Measuring Machine |
| CMOS | Complementary Metal-oxide Semiconductor |
| CMP | Chemical Mechanical Planarization |
| CMP | Chemical Mechanical Polishing |
| CMR | Common-mode Rejection Ratio |
| CMR | Cancel Move Request |
| CMS | Coordinate Measuring System |
| CMUG | Cost Modeling Users Group |
| CNC | Computer Numerical Control |
| CNC | Condensation Nucleus Counter |
| CNS | Central Nervous System |
| CNT | Carbon Nanotube |
| Co | Cobalt |
| COB | Chip-on-board |
| COC | Cost Of Consumables |
| CODEC | Coder-decoder |
| COED | Computer Optimized Experimental Design |
| COG | Chrome On Glass (Mask) |
| COGS | Cost Of Goods Sold |
| COO | Cost Of Ownership |
| COOL | Cost Of Ownership Luminator (Wright, Williams & Kelly) |
| COPS | Crystal Oriented Pits |
| CORBA | Common Object Request Broker Architecture |
| CORE | Composite Object Reference |
| COSS | Common Object Services Specification |
| COT | Customer-owned Tooling |
| CoV | Coefficient Of Variance |
| Cp | Process Capability |
| CP | Chip Place |
| CP/M | Computer Program/maintenance |
| CPA | Commerical Product Adhesive |
| CPD | Concurrent Product Development |
| CPE | Communications, Participation, And Education Program |
| CPGA | Ceramic Pin Grid Array |
| Cpk | Process Capability Index |
| CPM | Chamber Pressure Management |
| CPU | Central Processing Unit |
| CQFP | Ceramic Quad Flat Pack |
| CQN | Closed-queuing Network |
| Cr | Chromium |
| CR | Collisional Radiative |
| CRADA | Cooperative Research And Development Agreement |
| CRC | Cyclic Redundancy Check |
| CRM | Cost/Resource Model |
| CRT | Cathode Ray Tube |
| Cs | Cesium |
| CSA | CIM Systems Architecture |
| CSE | Control Systems Engineering |
| CSF | Critical Success Factor |
| CSL | Current-steering Logic |
| CSMA/CD | Carrier-sense, Multiple-access/collision Detection |
| CSP | Chip Scale Package |
| CSPED | Concurrent Semiconductor Production And Equipment Development |
| CST | CIM Systems Technology |
| CSTR | Continuously Stirred Tank Reactor |
| CSV | Comma-separated Variable |
| CT | Cycle Time |
| CTC | Cluster Tool Controller |
| CTE | Coefficient Of Thermal Expansion |
| CTF | Contrast Transfer Function |
| CTI | Computer-telephone Integration |
| CTI | Cycle Time Improvement |
| CTL | Complementary Transistor Logic |
| CTMC | Cluster Tool Modular Communications |
| Cu | Copper |
| CUB | Central Utility Building |
| CUBES | Capacity Utilization Bottleneck Efficiency System |
| CUI | Common User Interface |
| CUSUM | Cumulative Sum |
| CV | Capacitance Voltage |
| CVC | Chemical Vapor Cleaning |
| CVCM | Collected Volatile Condensable Materials |
| CVD | Chemical Vapor Deposition |
| CVS | Cyclic Voltammetry Stripping |
| CVS | Constant Voltage Stress |
| CW | Continuous Wave |
| CW | Clockwise |
| CWS | Chilled Water System |
| CYM | Cycle Model |
| Cz | Czochralski Process |