| I | Iodine |
| I/O | Input/output |
| I2L | Integrated Injector Logic |
| I300I | International 300 Mm Initiative |
| IA | Instrument Air |
| iALD | Ionized Atomic Layer Deposition |
| IBF | Ion Beam Figure |
| IC | Integrated Circuit |
| IC | Ion Chromatography |
| ICAP | Inductively-coupled Argon-plasma Spectrometry |
| ICCG | Incomplete Conjugate Gradient |
| ICMS | Integrated Circuit Measurement System |
| ICP | Inductively-coupled Plasma |
| ICP-AES | Inductively-coupled Plasma Atomic Emission Spectroscopy |
| ICP-MS | Inductively-coupled Plasma Mass Spectrometry |
| ICT | Ideal Cycle Time |
| ICW | Industrial City Water |
| Id | Drain Current |
| IDA | Intentional Defect Array |
| IDDQ | Direct Drain Quiescent Current |
| IDEAL | Initiating, Diagnosing, Establishing, Acting, Leveraging |
| IDL | Interface Definition Language |
| IDL | Implant Data Log |
| IDLH | Immediately Dangerous To Life Or Health |
| IDM | Integrated Device Manufacturer |
| IDS | Interactive Diagnostic System |
| Idsat | Saturation Current |
| IEA | Ion Energy Analysis |
| IEC | Infused Emitter Coupling |
| IEDF | Ion Energy Distribution Function |
| IEEE | Institute Of Electrical And Electronics Engineers |
| IEP | Interferometric Endpoint |
| IERN | Internal-external Recurrent Neural Network |
| IF | Interface |
| IF | Intermediate Focus |
| IFS | Iterated Function System |
| IG | Intrinsic Gettering |
| IGFET | Insulated-gate Field-effect Transistor |
| IHT | Ideal Handler Time |
| II | Ion Implant (also I2) |
| IIAP | IMEC Industrial Affiliation Programs |
| ILB | Inner Lead Bond |
| ILD | Interlevel Dielectric |
| ILD | Interlayer Dielectric |
| ILDS | Integrated Liquid Delivery System |
| ILS | Intracavity Laser Spectroscopy |
| IM | Integrated Model |
| IM | Integrated Metrology |
| IMD | Intermetal Dielectric |
| IMEC | Interuniversity MicroElectronics Center |
| IMMA | Ion Microphobe Mass Analysis |
| IMP | Ion Metal Plasma |
| IMR | Integrated Model Repository |
| IMS | Ion Mobility Spectroscopy |
| In | Indium |
| INCAMS | Individual Cassette Manufacturing System |
| IOC | Input/output Controller |
| IP | Image Placement |
| IP | Internet Protocol |
| IPA | Isopropyl Alcohol |
| IPD | In-plane Distortion |
| IPE | Internal Photoemission |
| IPL | Ion Projection Lithography |
| IPO | Initial Public Offering |
| IPP | Inplane Distortion |
| IPS | Inductive Plasma Source |
| IPT | Ideal Process Time |
| Ir | Iridium |
| IR | Infrared |
| IR-OBIRCH | Infrared Optical Beam-induced Resistance Charge |
| IRAS | Infrared Reflection-absorption Spectroscopy |
| IRIS | Imaging Of Radicals Interacting With Surfaces |
| IRLAS | Infrared Laser Absorption Spectroscopy |
| IRN | Internal Recurrent Neural Network |
| IRONMAN | Improving Reliability Of New Machines At Night |
| IRTC-1 | Interconnect Reliability Test Chip-1 |
| IS | Information Systems |
| IS | Interface Specifications |
| IS | Integrated Systems |
| ISA | Instrumentation Society Of America |
| ISC | Industry Steering Council |
| ISDN | Integrated Services Digital Network |
| ISEM | Inspection/review Specific Equipment Model |
| ISM | Inductor Super Magnetron |
| ISMI | International SEMATECH Manufacturing Initiative |
| ISPM | In Situ Particle Monitor |
| ISR | In Situ Rinse |
| ISS | Ion Scattering Spectroscopy |
| ISSG | In Situ Steam Generation |
| ITRI | Interconnection Technology Research Institute |
| ITRS | International Technology Roadmap For Semiconductors |
| IV | Current Voltage |
| IVH | Interstitial Via Hole |
| IVP | Integrated Vacuum Processing |
| IWN | Industrial Waste Neutralization |
| IYM | Integrated Yeild Management |