| M | Million |
| MACT | Maximum Achievable Control Technology |
| MALDI | Matrix-assisted Laser Desorption And Ionization |
| MAN | Metropolitan Area Network |
| MAP | Manufacturing Automation Protocol |
| MATS | Moisture Assisted Test Structures |
| MAWP | Maximum Allowable Working Pressure |
| MB | Machine Batch |
| MBC | Machine Bath Collection |
| MBE | Molecular Beam Epitaxy |
| MBL | Model-based Library |
| MBMS | Molecular Beam Mass Spectrometry |
| MBPC | Model-based Process Control |
| MBTC | Model-based Temperature Control |
| MBX | Message Bus Exchange |
| MCA | Measurement Capability Analysis |
| MCBA | Mean Cycles Between Assists |
| MCBF | Mean Cycles Between Failures |
| MCBI | Mean Cycles Between Interrupts |
| MCBSE | Mean Cycles Between Scrap Events |
| MCM | Multichip Module |
| MCM | Manufacturing Cycle Management |
| MCP | Master Control Processor |
| MCP | Multichip Package |
| MCP | Microchannel Plate |
| MCR | Mechanical Cold Run |
| MCS | Material Control System |
| MCT | Mercury Cadmium Telluride |
| MCU | Microprocessor Control Unit |
| MCU | Mobile Calibration Unit |
| MCVD | Metal Chemical Vapor Deposition |
| Md | Mendelevium |
| MD | Molecular Dynamics |
| MD-MOS | Multi-drain Metal-oxide Semiconductor |
| MDC | Mechanical Dry Cycle |
| MDL | Minimum Detection Limit |
| MDQ | Market-driven Quality |
| MDS | Modify Device Status |
| MDS | Modeling Data Specification |
| MDU | Modular Dispensing Unit |
| MEBS | Medium Energy Backscattering Spectrometry |
| MED | Modeling For Equipment Design |
| MEEF | Mask Error Enhancement Factor |
| MEIS | Medium Energy Ion Scattering |
| mELT | Modified Etch Lift-off |
| MEM | Manufacturing Enterprise Model |
| MEM | Manufacturing Equipment Monitor |
| MEMS | Microelectromechanical System |
| MEMS | Micromachines |
| MERIE | Magnetically Enhanced Reactive Ion Etching |
| MES | Manufacturing Execution System |
| MESC | Modular Equipment Standards Committee (SEMI) |
| MESC | Modular Equipment Sub-Committee For Communications |
| MESFET | Metal-semiconductor Field Effect Transistor |
| MET | Micro-exposure Tool |
| METL | Multi-element Two-layer |
| METS | Materials And Equipment Trading Service |
| MeV | Mega-electrovolt |
| MFC | Mass Flow Controller |
| MFM | Mass Flow Meter |
| MFS | Modified Fused Silica |
| Mg | Magnesium |
| MG | Manufactured Goods |
| MGC | Manufactured Goods Collection |
| MGE | Modulator Generalized Ellipsometry |
| MHI | Material Hazard Index |
| MHT | Mechanical Handling Test |
| MHz | Megahertz |
| MIC | Monolithic Integrated Circuit |
| MID | Material ID |
| MIE | Magnetron Ion Etching |
| MIE | Mask Inspection Enclosure |
| MIGS | Metal-induced Gap State |
| MIM | Metal-insulator-metal |
| MIMAC | Measurement And Improvement Of Manufacturing Capacity |
| MIMD | Management Information Of Metrology Data |
| MIMO | Multi-input, Multi-output |
| MIS | Metal Insulator Silicon |
| MIS | Metal Insulator Semiconductor |
| MLCC | Multilayer Ceramic Capacitors |
| MLL | Modify Lot Location |
| MLM | Multilevel Metal |
| MLP | Multilayer Perceptron |
| MLR | Message Log Report |
| MLV | Modify Logging Versions |
| MM | Manufacturing Methods |
| MM | Machine Model |
| MMC | Manufacturing Methods Council |
| MMD | Microlithographic Mask Development Program |
| MMIC | Monolithic Microwave Integrated Circuit |
| MMM | Material Movement Management |
| MMMC | Machine Material Movement Component |
| MMMS | Material Movement Management Standard |
| MMO | Multimodel Optimization |
| MMOS | Modified MOS |
| MMST | Microelectronics Manufacturing Science And Technology |
| Mn | Manganese |
| MNA | Match Network Analyzer |
| MNOS | Metal-nitride-oxide Semiconductor |
| MNPD | Maximum Non-printable Defect |
| MNS | Metal-nitride Semiconductor |
| Mo | Molybdenum |
| MO | Metal-organic |
| MOCVD | Metal-organic Chemical Vapor Deposition |
| MOP | Modify Operating Procedures |
| MOS | Metal-oxide Semiconductor |
| MOS-C | Metal-oxide Semiconductor Capacitor |
| MOSFET | Metal-oxide Semiconductor Field Effect Transistor |
| mp | Melting Point |
| MP | Massively Parallel |
| MP-OES | Multipoint Optical Emission Spectroscopy |
| Mpa | Mega Pascals |
| MPP | Multiphase Printing |
| MPRES | Modular Plasma Reactor Simulator |
| MPU | Microprocessor Unit |
| MPX | Multiplex |
| MRF | Magnorheological Finishing |
| MRP | Materials Requirements Planning |
| MRP-II | Manufacturing Resource Planning |
| MRS | Materials Research Society |
| MRS | Mass Resolving Slit |
| MS | Mass Spectrometry |
| MS | Mass Spectrometer |
| MS | Mass Spectroscopy |
| MSB | Most Significant Bit |
| MSD | Mass Selective Detector |
| MSDS | Material Safety Data Sheet |
| MSEM | Metrology Specific Equipment Model |
| MSFR | Mid-spatial Frequency Roughness |
| MSG | Management Steering Group |
| MSHA | Mine Safety And Health Administration |
| MSI | Medium-scale Integration |
| MSI | Manufacturing Support Item |
| MSID | Mass Spectrometer Lead Detector |
| MSL | Modify System Logging |
| MSLD | Mass Spectrometer Leak Detector |
| MSS | Modify System State |
| MSTAB | Manufacturing Systems Technical Advisory Board |
| MTAS | Methyltriacetoxysilene |
| MTBA | Mean Time Between Assists |
| MTBAp | Mean (productive) Time Between Assists |
| MTBC | Mean Time Between Cleans |
| MTBF | Mean Time Between Failures |
| MTBFp | Mean (productive) Time Between Failures |
| MTBI | Mean Time Between Interrupts |
| MTBI | Mean Time Between Incidents |
| MTBIp | Mean (productive) Time Between Interrupts |
| MTF | Modulation Transfer Function |
| MTOL | Mean Time Off Line |
| MTOL | Mean Time On Line |
| MTS | Material Tracking Standard |
| MTTA | Mean Time To Assist |
| MTTC | Mean Time To Correct |
| MTTCR | Mean Time To Correct And Recover |
| MTTF | Mean Time To Failure |
| MTTR | Mean Time To Repair |
| MUL | Modify User Login |
| MUP | Modify User Password |
| MV | Megavolt |
| MVC | Model View Controller |
| MVH | Micro Via Hole |
| MVTR | Moisture Vapor Transmission Rate |
| MW | Molecular Weight |
| MWBC | Mean Wafers Between Cleans |
| MWBF | Mean Wafers Between Failures |
| MWBI | Mean Wafers Between Interrupts |
| MWT | Monitor Wafer Turner |