| S | Sulfur |
| S/A | Sensor/actuator |
| S/D | Source/drain |
| s/n | Serial Number |
| S/N | Signal-to-noise |
| SA | Surface Area |
| SA | Subresolution Assist |
| SA | Structured Analysis |
| SA | Sensitivity Analysis |
| SAA | Static Automated Analysis |
| SAB | Sensor/actuator Bus |
| SACVD | Sub-atmospheric Chemical Vapor Deposition |
| SAD | Selected Area Diffraction |
| SAE | Society Of Automotive Engineers |
| SAF | Stuck-at Fault |
| SAM | Scanning Auger Microscopy |
| SAM | Scanning Acoustical Microscopy |
| SAM | Self-assembled Monolayer |
| SANS | Small Angle Neutron Scattering |
| SAT | Spray Acid Tool |
| SAW | Surface Acoustic Wave |
| SAXS | X-ray Scattering |
| Sb | Antimony |
| SB | Strong Base Ion Exchange |
| SBC | Standard Buried Collector |
| SBl | Safety Bulletin |
| Sc | Scandium |
| SC1 | Standard Clean 1 |
| SC2 | Standard Clean 2 |
| SCA | Surface Charge Analysis |
| SCALE | SEMATECH Cell Application Learning Environment |
| SCALPEL | Scattering With Aperture Limited Projection Lithography |
| SCBA | Self-contained Breathing Apparatus |
| SCC | Strategic Cell Controller |
| SCCDRM | Single Crystal Critical Dimension Reference Material |
| SCCS | Source Code Control System |
| SCDS | Super Catalytic Decomposition System |
| SCE | Saturated Calomel Electrode |
| SCE | Short Channel Effects |
| SCE | Short Channel Effects |
| SCF | Supercritical Fluid |
| SCFH | Standard Cubic Feet Per Hour |
| SCI | Surface Charge Imaging |
| SCIC | Semiconductor Integrated Circuit |
| SCM | Scanning Capacitance Microscopy |
| SCOE | SEMATECH Center Of Excellence |
| SCP | Single Chip Package |
| SCR | Silicon Controlled Rectifier |
| SD | Small Dual In-line Package |
| SD | Structured Design |
| SDFL | Schottky-diode FET Logic |
| SDLC | Synchronous Data Link Control |
| SDM | Specific Device Model |
| SDS | Smart Distributed System |
| SDS | Safe Delivery System |
| SDSI | Synchronous Data-link Control |
| Se | Selenium |
| SE | Spectroscopic Ellipsometry |
| SE | Secondary Electron |
| SE | Scattered Electron |
| SEAJ | Semiconductor Equipment Association Of Japan |
| SEC | Size Exclusion Chromatography |
| SECS | Semiconductor Equipment Communications Standard |
| SEG | Selective Epitaxial Growth |
| SEIM | Software Engineering Improvement Method |
| SEM | Scanning Electron Microscopy |
| SEM | Specific Equipment Model |
| SEMI | Semiconductor Equipment And Materials International |
| SemiSPIN | Semiconductor Software Process Improvement Network |
| SEP | Software Engineering Process |
| SEP | Spin Etch Planarization |
| SEPG | Software Engineering Process Group |
| SEQDB | Semiconductor Equipment Database |
| SER | Soft Error Rate |
| SETEC | Semiconductor Equipment Technology Center |
| SEVD | Sphere Equivalent Volume Diameter |
| SFC | Supercritical Fluid Chromatography |
| SFCS | Shop Floor Control System |
| SFCS I/F | Shop Floor Control System Interface |
| SFP | Stress-free Polishing |
| SGML | Standard Generalized Markup Language |
| SGMM | Semiconductor Generic Manufacturing Model |
| SGMRS | Semiconductor Generic Manufacturing Requirements Specification |
| SHI | Spatial Heterodyned Interferometry |
| Si | Silicon |
| SIA | Semiconductor Industry Association |
| SIDP | Sputter Ion Depth Profiling |
| SIL | Systems Integration Lab (was ATF) |
| SILC | Stress-induced Leakage Current |
| SiLK | Silicon Low-k |
| SIM | Selective Ion Marketing |
| SIM | Selective Ion Monitoring |
| SIMO | Single Input, Multi Output |
| SIMOX | Separation By Implantation Of Oxygen |
| SIMS | Secondary Ion Mass Spectroscopy |
| SIP | SEMATECH Internal Program |
| SIP | Self-ionizing Plasma |
| SIRIJ | Semiconductor Industry Research Institute Of Japan |
| SIS | Self-ionized Sputter |
| SISO | Single Input, Single Output |
| SIV | Sensors In Vacuum |
| SL | Specification Limit |
| SLAM | Scanning Laser Acoustic Microscopy |
| SLAM | Single Layer Alumina Metallization |
| SLC | Surface Laminar Circuit |
| SLDY | Systematic Limited Yield |
| SLM | Single-level Metal |
| SLOC | Source Lines Of Code |
| SLSI | Super Large Scale Integration |
| Sm | Samarium |
| SM | Stress Migration |
| SMB | Single-mask Bumping |
| SMC | Surface-mounted Components |
| SMD | Surface-mounted Device |
| SME | Subject Matter Expert |
| SME | Software Maintenance Engineer |
| SME | Semiconductor Manufacturing Equipment |
| SMG | Screen Management Guide |
| SMIF | Standard Mechanical Interface |
| SMLY | Systematic Mechanisms Limited Yield |
| SMPM | SECS Message Protocol Machine |
| SMR | Semiconductor Mask Representation |
| SMS | SECS Message Service |
| SMT | Surface Mount Technology |
| SMTS | Strategic Material Transport System |
| Sn | Tin |
| SNL | Sandia National Laboratory |
| SNMS | Sputtered Neutral Mass Spectroscopy |
| SNOM | Scanning Nearfield Optical Microscopy |
| SNR | Signal-to-noise Ratio |
| SO | Small Outline (package) |
| SOC | System On A Chip |
| SOC | Silicon-on-chip |
| SoCoMo | Source Collector Module |
| SOD | Spin-on Dielectric |
| SODAS | SEMATECH Organized Damage Analysis Software |
| SOG | Spin-on Glass |
| SOI | Silicon On Insulator |
| SOIC | Small Outline Integrated Circuit |
| SOM | Scanning Optical Microscopy |
| SOM | Sulfuric Acid-ozone Mixture |
| SON | Small Outline Nonleaded Package |
| SONOS | Silicon/oxide/nitride/oxide/silicon |
| SOP | Standard Operating Procedure |
| SOS | Silicon On Sapphire |
| SOW | Statement Of Work |
| SPC | Statistical Process Control |
| SPF | Spectral Purity Filter |
| SPI | Software Process Improvement |
| SPICE | Simulation Program With Integrated Circuit Emphasis |
| SPIDER | SEMATECH Process Induced Damage Effect Revealer |
| SPIDER-MEM | SPIDER-Manufacturing Equipment Monitor |
| SPIN | Software Process Improvement Network |
| SPL | Surface Protection Layer |
| SPM | Scanning Probe Microscopy |
| SPM | Sulfuric Acid/hydrogen Peroxide Mixture |
| SPP | Single-phase Printing |
| SPR | Semiconductor Process Representation |
| SPS | Surface Preparation System |
| SPT | Shortest Processing Time |
| SPV | Surface Photovoltage |
| SQC | Statistical Quality Control |
| SQL | Structured Query Language |
| SQPMM | Software Quality And Process Maturity Model |
| Sr | Strontium |
| SRAC | Supplier Relations Action Council |
| SRAM | Static Random Access Memory |
| SRC | Semiconductor Research Corporation |
| SRM | Standard Reference Material |
| SRP | Spreading Resistance Probe |
| SRPT | Shortest Remaining Processing Time |
| SRS | Software Requirements Specification |
| SSA | Semiconductor Safety Association |
| SSA | Spatial Signature Analysis |
| SSC | Subsystem Controller |
| SSE | Sum Squared Error |
| SSEM | Stepper Specific Equipment Model |
| SSI | Small Scale Integration |
| SSM | Strategic Sourcing Methodology |
| SSQA | Standardized Supplier Quality Assessment |
| SSRL | SEMATECH Software Reuse Library |
| SSRP | SEMATECH Software Reuse Program |
| STA | Static Timing Analysis |
| STAR | Simultaneous Transmitted And Reflected |
| STEL | Short-term Exposure Limit |
| STEM | Scanning Transmission Electron Microscope/microscopy |
| STI | Shallow Trench Isolation |
| STIFI | Shallow Trench Isolation Final Inspection |
| STM | Scanning Tunneling Microscopy |
| STP | Standard Temperature And Pressure |
| STP | System Test Plan |
| SU | Subresolution Attenuated |
| SUT | System Under Test |
| SVD | Singular Value Decomposition |
| SVID | System Variable Identifier |
| SWAT | Software Action Team |
| SWC | Solvent Waste Collection |
| SWEAT | Standard Wafer-level Electromigration Accelerated Test |
| SWI | Static Walkthrough/inspection |
| SWIM | Semiconductor Workbench For Integrated Modeling |
| SWP | Single Wafer Processing |
| SWR | Semiconductor Wafer Representation |
| SWV | Square Wave Voltammetry |
| SXR | Specular X-ray Reflectance Or Reflectometry |