1. The HEMT Principle for High-Frequency Applications
The two-dimensional electron gas (2DEG) principle, already introduced for the GaN power HEMT in the GaN Power Devices chapter, also underlies high-frequency HEMTs based on GaAs and InP: a heterostructure of two semiconductors with different band gaps creates an undoped, high-mobility channel at the interface, whose electrons are spatially separated from the ionized impurities of the donor region.
For high-frequency applications, GaAs is typically used in the form of a pseudomorphic HEMT (pHEMT) or a metamorphic HEMT (mHEMT) with an InGaAs channel, since InGaAs, with mobilities of 10,000 to 12,000 cm²/Vs, offers even higher electron mobility than pure GaAs. Parameters such as the transit frequency fT and the maximum oscillation frequency fmax of modern GaAs pHEMTs reach 100 to 150 GHz, while highly scaled InP HEMTs with gate lengths below 50 nm have demonstrated fT values above 600 GHz in the laboratory, making these devices suitable for applications approaching the terahertz-adjacent millimeter-wave range.